TS3335D Series | Thin Film Laser Trimming Machine

The TS3335D-1 series multifunctional laser trimming machine is suitable for tuning of various thin-film circuits, such as inertial gyroscopes, high-precision resistors, analog ICs, and precision laser trimming of thin-film sensors. The TS3335D-1 series wafer-level laser trimming machine is suitable for trimming of semiconductor wafers and various high-precision MEMS devices.

Details

TS3335D

The TS3335D-1 series multifunctional laser trimming machine is suitable for tuning of various thin-film circuits, such as inertial gyroscopes, high-precision resistors, analog ICs, and precision laser trimming of thin-film sensors. The TS3335D-1 series wafer-level laser trimming machine is suitable for trimming of semiconductor wafers and various high-precision MEMS devices.

Specifications

ModelTS3335D -ⅠTS3335D – Ⅱ
Wavelength355nm356nm
Laser Power>2W>1W
Beam Size10-15μm4-5μm
Scanning Speed0-6000mm/s Adjustable0-6000mm/s Adjustable
XY Stage Travel200*300mm200*300mm
XY Stage Precision±1μm±1μm